Facilities:

Deposition apparatus

Twin Hybrid Plasma Spray System   Mesoplasma hybrid plasma CVD system  
   
RF Sputtering System   ICP-CVD System  
   
Electron Beam Deposition Chamber   Sputtering Chamber  
   

Anaysis Apparatus

Atomic Force Microscope Laser Microscope Hall Measurement System
Semiconductor Parameter Analyzer Solar Simulator FT-IR with spherical integration detector  
 
Nanoindentor Microvickers Surface Profiler  
 
Small Angle X-ray Scattering SAXS system

Manual Prober

Gas detection system