Facilities:
Deposition apparatus
Twin Hybrid Plasma Spray System
Mesoplasma hybrid plasma CVD system
RF Sputtering System
ICP-CVD System
Electron Beam Deposition Chamber
Sputtering Chamber
Anaysis Apparatus
Atomic Force Microscope
Laser Microscope
Hall Measurement System
Semiconductor Parameter Analyzer
Solar Simulator
FT-IR with spherical integration detector
Nanoindentor
Microvickers
Surface Profiler
Small Angle X-ray Scattering SAXS system
Manual Prober
Gas detection system